Atmospheric plasma thin film silicium coating
- Thin film coating of SiO2 or SiOx
- Operrating oin open air
- Cold and fast coating
- Easy to use
- Easy to carry & integrate
Precursor injection module
- HMDS type liquid precursor
- Gestion precise du debit de precurseur et de gaz porteur
- Touch screen interface
- buse d’ingection compatible ULS
- Stand-alone or OEM